The Southampton Nanofabrication Centre (SNC) is a state-of-the-art facility providing micro- and nano-fabrication services for commercial and academic organisations. We offer production capability from pilot line 200 mm (8”) wafer batches down to single chip level R&D accompanied by a wide range of characterisation capabilities. The SNC is a purpose built, 820m² cleanroom, we have an experienced team of dedicated design and process engineers to help translate your needs into shipped devices. 

Our lithography resolution ranges from a few nm (200 keV JEOL JBX-8100FS G3 ebeam) to a few hundred nm (Nikon KrF laser NSR-S204B scanner) and from µm to hundreds of µm, giving an ultimate resolution down to 6 nm. Focussed Ion Beam is available as well as a range of nano imprint lithography and hot embossing methods for nanofabrication. 

The facility is used for fabrication of/on a range of materials including group IV semiconductors (Si, Ge, SiGe, SiC), III/V compound semiconductors (GaAs, GaN, InP), 2D materials (graphene, MoS₂). A wide range of deposition and etch capability including ALD, PVD, PECVD, LPCVD, FHD, DRIE, ICP, RIE, IBE, HF vapour, XeF2 vapour, CMP, electroplating. A broad background in fabricating 2D materials, quantum devices, photonics, neuron memory, semiconductors, III-V, μLEDs, micro- and nano-fluidics, sensors, FETs, MEMS, NEMS, PV. Wafer to wafer aligning and bonding using anodic, fusion, thermocompression and polymer methods is available for the construction of multi-stack devices.

Characterisation is a large component of the operation of the cleanroom with a range of standard and novel methods. The Focussed Ion Beam is dual beam with an integrated SEM; there is a FEGSEM, a range of AFMs; a composite SEM with Xradia and environmental capabilities is available. Electrical characterisation systems are available for both commercial and research purposes along with back end of line (BEOL) and advanced packaging services. 

The facility is intended to be available for research, development and commercial projects through collaborative work and the placement of staff in the facility. Researchers are encouraged to use the clean room for their research and to develop skills and techniques that allow them to innovate in imaginative new ways. Potential research collaborators are encouraged to contact one of the academic staff through the group research pages.

Visitors with industrial or commercial interests should contact our commercial development office at ecspartners@ecs.soton.ac.uk or +44 (0)23 8059 2650