The clean room provides a flexible capability for the fabrication of semiconductor devices using a variety of different technologies. A wide variety of industrial applications are addressed, ranging from solar energy to electronics and photonics and to healthcare. The clean room equipment includes traditional microelectronics equipment for the fabrication of transistors and circuits and nanofabrication equipment for producing nanoscale structures and devices using top-down and bottom-up approaches. This combination of fabrication approaches provides a powerful capability for micro- and nano-technology research.
