The 8 inch Cascade SUMMIT 12000B Semi-Automatic probe station with Agilent N5250A 67GHz Vector Network Analyzer allows S-parameter measurements and other RF measurements to the highest precision. It has micro chamber, providing dry, shielded wafer enclosure for reduced EMI and RFI interference and access to the 4 RF positioner controls even when system is electrically sealed. Our current set-up includes GSG (Ground-Signal-Ground) Infinity Probes with a 100 micron pitch but GS and GSGSG Probes could be mounted. It has 4 also DC positioners and a triaxial thermal chuck.
- High performance Infinity RF probes for measurements up to 67 GHz
- Contact resistance <50mΩ on Al pads
- Calibration verification of reflection standard better than +/- 0.05dB to 67GHz
- Programmable X, Y, Z and Theta stage
- 5mm Z stage with 1 micron resolution
- 51mm/sec X, Y Stage Speed with 2 micron accuracy