Southampton Nanofabrication Centre

X-Ray Photoelectron Spectroscopy (XPS)

The Thermo Scientific™ Theta Probe is a high performance X-ray photoelectron spectroscopy (XPS) system designed for ultra-thin film analysis. It uses a microfocused X-ray source to measure the chemical state of the surface of complex thin films, eg. high-k dielectrics of semiconductor devices, or self-assembled monolayers.

XPS analysis can reveal information about the electronic structure of the material surface for example understanding failed electrical contact due to oxidation, corrosion or contamination.


XPS allows identification of all elements and their oxidation state present (excepting H and He) within the top 10 nm of the surface. Dual-beam charge compensation for insulator analysis.

Depth Profiling

XP can measure the thickness of one or more thin layers of different materials within the top 10 nm of the surface.

Sample Viewing

Digital camera aligned normal to the sample stage for precise alignment.