Southampton Nanofabrication Centre


The Woolham M-2000 spectroscopic ellipsometer offers a high speed and a wide wavelength range, with automated angle (40-90 degrees) and integrated focussing. The high speed enables measurements of layer thickness and refractive index to be quickly made at several points across a wafer. The spot size of 150 micron allows measurements of layer thickness to be made in scribe lanes that are typically 300 micron across. The ellipsometer has a spectral range of 190-1000nm and is equipped with a liquid cell to allow thickness measurements in liquids.