• Overview
• Nanometrology
  • FIB
  • He Ion Microscope
  • FESEM
  • SEM
  • Ellipsometry
  • XPS
• SPM
  • High Resolution SPM
  • Raman (TERS) SPM
  • Cryogenic SPM
  • Standard AFM
• Electrical and RF
  • Magneto Resistance
  • Single Electron
  • Deep Level Transient
  • MEMs Tester
  • RF Probe Station
  • DC-IV Probe Station
  • 4 Point Probe Station
• Design and Simulation

He lon Microscope

The Zeiss Orion helium ion microscope is a new type of microscope that uses helium ions for surface imaging and analysis. Its functionality is similar to a scanning electron microscope, but it uses a focused beam of helium ions instead of electrons. Since helium ions can be focused into a smaller probe size and provide a much smaller sample interaction compared to electrons, the ORION generates higher resolution images with better material contrast and improved depth of focus. The high resolution arises from the use of a finely sharpened needle and a process that strips individual atoms away from the source until an atomic pyramid is created with just three atoms at the very end of the source tip. The Orion achieves a resolution of less than 0.9nm at an energy of 25-30kV and can deliver beam currents between 1fA and 25pA. Analysis of material composition can also be performed using Rutherford backscattering.